Thermionics VE-100 E-Beam Evaporator
The VE-100 e-beam evaporator non-conformally deposits thin films of virtually any material using one of three, 3 kW electron beam sources in a low temperature environment. The instrument is equipped with a 12" by 18" bell jar, with a 12" collar with multiple accessory ports. Deposition rate is controlled using an Inficon XTC quartz crystal monitor system.
Matials currently available for use:
- Aluminum
- Aluminum Oxide
- Cerium(IV) Oxide
- Chromium
- Cobalt
- Gold
- Iron
- Nickel
- Palladium
- Platinum
- Silicon Dioxide
- Silver
- Strontium Fluoride
- Titanium
Click the link below to access the standard operating procedure (SOP) for this instrument
