Thermionics VE-100 E-Beam Evaporator


The VE-100 e-beam evaporator non-conformally deposits thin films of virtually any material using one of three, 3 kW electron beam sources in a low temperature environment. The instrument is equipped with a 12" by 18" bell jar, with a 12" collar with multiple accessory ports. Deposition rate is controlled using an Inficon XTC quartz crystal monitor system.

Matials currently available for use:

  • Aluminum
  • Aluminum Oxide
  • Cerium(IV) Oxide
  • Chromium
  • Cobalt
  • Gold
  • Iron
  • Nickel
  • Palladium
  • Platinum
  • Silicon Dioxide
  • Silver
  • Strontium Fluoride
  • Titanium

To access the SOP for the instrument, please click here.

Thermionics

Thermionics VE-100 E-Beam Evaporator