Thermionics VE-100 E-Beam Evaporator
The VE-100 e-beam evaporator non-conformally deposits thin films of virtually any material using one of three, 3 kW electron beam sources in a low temperature environment. The instrument is equipped with a 12" by 18" bell jar, with a 12" collar with multiple accessory ports. Deposition rate is controlled using an Inficon XTC quartz crystal monitor system.
Matials currently available for use:
- Cerium(IV) Oxide
- Strontium Fluoride