PVD Chamber

The physical deposition chamber is used to deposit silanizing agents to PDMS masters for easier PDMS delamination after curing, or for surface modification of various materials.

The following silanizing agents are immediately available for use:

• Hexamethyldisilazane (HMDS)
• Trichloro-(1H,1H,2H,2H-perfluorooctyl)-silane (PFOTS)
• Hexamethyldisiloxane (HMDSO)