Yield Engineering YES-310TA HMDS Oven

The YES-310TA is a vacuum oven, specifically designed to coat substrates with HMDS (hexamethyldisilazane) for improved photoresist adhesion.

While capable of also functioning as a photoresist image reversal oven, the YES-310TA is not currently plumbed with the requisite ammonia gas. This capability may be added in the future.

Follow the link below to access the Standard Operating Procedure (SOP) for the YES-310TA.