Rates & Fees
To set up an external academic account, please contact Alicia Reed of KUCR at amreed@ku.edu.
To set up an Industry and Corporate account, please contact the Industry Agreements office at 785-864-7403 or indcontracts@ku.edu.
Hourly Rates
All hourly rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum.
| Equipment | Internal Academic | External Academic | External Market |
|---|---|---|---|
| Lesker Sputterer | $16 / hour | $24 / hour | $48 / hour |
| E-Beam Evaporator | $16 / hour | $24 / hour | $48 / hour |
| Oxford PECVD * | $30 / hour | $45 / hour | $90 / hour |
| Oxford ICP-RIE * | $40 / hour | $61 / hour | $120 / hour |
| Nano-Imprint Lithography | $11 / hour | $17 / hour | $33 / hour |
| Hitachi SEM | $36 / hour | $55 / hour | $108 / hour |
| HEX03 Heated Press | $11 / hour | $17 / hour | $33 / hour |
Additional consumables costs may also apply (see below).
*In addition to process time, three hours of instrument time will be added for startup and shutdown.
All hourly rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum.
| Internal Academic | External Academic | External Market |
|---|---|---|
| $47 / hour | $71 / hour | $141 / hour |
This rate applies to all labor provided by facility staff, including training, fabrication, assistance and/or any other related service. This rate will be applied in addition to any applicable rates, fees and consumables costs as required by the labor provided.
Usage Fees
This fee is applied once per day per user.
| Internal Academic | External Academic | External Market |
|---|---|---|
| $15 | $23 | $45 |
| Equipment | Internal Academic | External Academic | External Market |
|---|---|---|---|
| Photolithography Room | $45 | $68 | $135 |
| Mask Writer | $57 | $86 | $171 |
| Etching Room | $26 | $39 | $78 |
| Horiba Ellipsometer | $23 | $35 | $69 |
| Sputter Coater | $15 | $23 | $45 |
| PDMS Station | $12 | $18 | $36 |
| Plasma Reactor | $11 | $17 | $33 |
| Hot Embosser | $22 | $33 | $66 |
| CO2 LASER Engraver | $11 | $17 | $33 |
| Wafer Dicer | $21 | $32 | $63 |
| Wire Bonder | $11 | $17 | $33 |
| Figure 4 3D Printer | $16 | $24 | $48 |
The usage fees above are charged once per day per user, and may be applied in addition to applicable hourly rates and consumables costs. Uses are tabulated from log books or log-in mechanisms.
| Categogy | Material | Cost | Unit |
|---|---|---|---|
| Photolithography | SU8 Photoresist | $1.10 | per gram |
| SUEX K150 SU8 Laminates | $17.50 | each | |
| SUEX K200 SU8 Laminates | $18.00 | each | |
| SUEX K500 SU8 Laminates | $21.00 | each | |
| SU8 Developer | $0.05 | per gram | |
| AZ 1518 Photoresist | $0.30 | per gram | |
| AZ 9260 Photoresist | $0.85 | per gram | |
| AZ 15nXT 115CPS Photoresist | $1.25 | per gram | |
| AZ 300 MIF Developer | $0.01 | per gram | |
| AZ 400K Developer | $0.02 | per gram | |
| 1165 Microposit Remover | $0.06 | per gram | |
| 4" Silicon Wafer (P-type <100>) | $11.00 | each | |
| 4" SiO2-coated (300 nm) Silicon Wafer (P-type <100>) | $24.00 | each | |
| 6" Silicon Wafer (P-type <100>) | $16.00 | each | |
| 5" Quartz Glass Plate — Chrome and Photoresist Coated | $115.00 | each | |
| 4" Borosilicate Glass Plate — Chrome and Photoresist Coated | $31.00 | each | |
| 4" Borosilicate Glass Plate — Blank | $14.50 | each | |
| 5" Soda Lime Glass Plate — Chrome and Photoresist Coated, Master Grade | $30.00 | each | |
| 4" Soda Lime Glass Plate — Chrome and Photoresist Coated | $15.50 | each | |
| 4" Soda Lime Glass Plate — Blank | $7.50 | each | |
| 4" Photomask Compact | $5.00 | each | |
| 5" Photomask Compact | $5.00 | each | |
| Metal Deposition | Gold | MKT | per ounce |
| Platinum | MKT | per ounce | |
| Palladium | MKT | per ounce | |
| Stratasys 3D Printer | ABS Plastic Filament | $3.25 | per in3 |
| Soluble Support Filament | $6.25 | per in3 | |
| Figure 4 3D Printer | ELAST-BLKN 10 Resin | $0.25 | per gram |
| JCAST-GRN 10 Resin | $0.30 | per gram | |
| MED-AMB 10 Resin | $0.30 | per gram | |
| TOUGH-GRY 15 Resin | $0.25 | per gram | |
| Soft Lithography | Polydimethylsiloxane (PDMS) | $0.25 | per gram |
| Miscellaneous | Cleanroom Notebooks | $14.00 | each |
| 150 mm Petri Dishes (10 pack) | $7.50 | each |
The above consumables are provided to cleanroom users at cost. Scales are provided to record material weights. Precious metal prices are determined at the time of use; reclamation fees are also applied. Additional materials can be acquired and provided at user request. Prices are subject to change without notice.
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