Rates & Fees
Rates are effective June 1, 2024. Please contact us for information regarding previous rates.
To set up an Industry and Corporate account, please contact the Industry Agreements office at 785-864-7403 or indcontracts@ku.edu.
Usage Fees
This fee is applied once per day per user.
| Internal Academic | External Academic | External Market |
|---|---|---|
| $23 | $35 | $69 |
| Equipment | Internal Academic | External Academic | External Market |
|---|---|---|---|
| Photolithography Room | $42 | $64 | $126 |
| Etching Room | $30 | $46 | $90 |
| Horiba Ellipsometer | $20 | $31 | $60 |
| Sputter Coater * | $19 | $29 | $57 |
| PDMS Station | $15 | $23 | $45 |
| Plasma Reactor | $15 | $23 | $45 |
| Profilometer | $20 | $31 | $60 |
| Wabash Press | $14 | $21 | $42 |
| CO2 LASER Engraver | $10 | $15 | $30 |
| Wafer Dicer * | $21 | $32 | $63 |
| Wire Bonder | $12 | $18 | $36 |
| Figure 4 3D Printer | $23 | $35 | $69 |
The usage fees above are charged once per day per user except where noted (*), which are charged once per process. Additional consumables costs may be applied.
Hourly Rates
| Equipment | Internal Academic | External Academic | External Market |
|---|---|---|---|
| Lesker Sputterer | $19 / hour | $29 / hour | $57 / hour |
| E-Beam Evaporator | $18 / hour | $28 / hour | $54 / hour |
| Oxford PECVD | $34 / hour | $52 / hour | $102 / hour |
| Oxford ICP-RIE | $59 / hour | $90 / hour | $177 / hour |
| Nano-Imprint Lithography | $13 / hour | $20 / hour | $39 / hour |
| Hitachi SEM | $41 / hour | $63 / hour | $123 / hour |
| HEX03 Heated Press | $13 / hour | $20 / hour | $39 / hour |
| Mask Writer | $14 / hour | $21 / hour | $42 / hour |
All hourly rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum. Additional consumables costs may be applied.
| Internal Academic | External Academic | External Market |
|---|---|---|
| $47 / hour | $72 / hour | $141 / hour |
Labor rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum. These rates apply to all labor provided by facility staff, including training, fabrication, assistance and/or any other related service. These rates will be applied in addition to any applicable rates, fees and consumables costs as required by the labor provided.
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