Rates & Fees


Rates are effective November 1, 2025. Please contact us for information regarding previous rates.

To set up an Industry and Corporate account, please contact the Industry Agreements office at 785-864-7403 or indcontracts@ku.edu.

Usage Fees

This fees is applied once per day per user.

Internal AcademicExternal AcademicExternal Market
$40$62$120
Equipment or Workspace

Internal Academic

External Academic

External Market

Photolithography Workspace

$67

$104

$201

Etching Room

$41

$63

$123

PDMS Workspace

$23

$36

$69

AFM

$27

$42

$81

Profilometer

$12

$19

$36

Sputter Coater *

$19

$29

$57

Plasma Reactor

$23

$36

$69

Wafer Dicer *

$34

$53

$102

Wire Bonder

$23

$36

$69

3D Printer Workspace

$25

$39

$75

CO2 Laser Engraver

$4

$6

$12

Wabash Hydraulic Press

$8

$12

$24

The usage fees above are charged once per day per user except where noted (*), which are charged once per process. Additional consumables costs may be applied.

Hourly Rates

Equipment

Internal Academic

External Academic

External Market

Lesker Sputterer$25$39$75
E-Beam Evaporator$21$32$63
Oxford PECVD$43$66$129
Oxford ICP-RIE$58$90$174
Nano-Imprint Lithography$23$36$69
Hitachi SEM$56$87$168
HEX03 Press$14$22$42
Mask Writer$16$25$48

All hourly rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum. Additional consumables costs may be applied.

Internal AcademicExternal AcademicExternal Market
$48$74$144

Labor rates are rounded up or down to 15 minute intervals, with a required 15 minute minimum. These rates apply to all labor provided by facility staff, including training, fabrication, assistance and/or any other related service. These rates will be applied in addition to any applicable rates, fees and consumables costs as required by the labor provided.

Have Questions?

For any questions regarding rates, fees or billing, contact the facility director, Ryan Grigsby.
PDSM Station chip