Hitachi FlexSEM 1000 II

The Hitachi FlexSEM 1000 II is a variable pressure scanning electron microscope. The FlexSEM-II is equipped with a secondary electron detector, a 5-segment back-scattered electron detector, and a ultra-variable-pressure detector for variable pressure SE imaging, which gives it the ability to image non-conductive surfaces, such as plastic and silicon substrates with submicron resolution.

Also included is an Oxford EDS system that makes it possible to perform simultaneous elemental analysis of surfaces.

A Sputter Coater is available for preparing samples for imaging, if necessary.