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THE UNIVERSITY of KANSAS
University of Kansas logo
Office of Research
KU Nanofabrication Facility
Home
  • myKU
  • Email
  • Canvas
  • Enroll & Pay
  • Jayhawk GPS
Main navigation
  • Home
  • Services
  • Equipment
    • Photolithography
      • Mask Writer
      • Flood Source
      • HMDS Oven
      • Spin Coater & Baking Tools
      • SU8 Laminating
    • Deposition
      • DC Sputterer
      • E-Beam Evaporator
      • Plasma Deposition
      • Quorum Sputter Coater
      • Denton Sputter Coater
    • Etching
      • Plasma Etching
      • Plasma Reactors
      • Wet Etch Room
    • Embossing
      • Nanoimprint Lithography
      • Jenoptik HEX03 Press
      • Wabash Press
    • Metrology
      • Nanosurf AFM
      • Hitachi SEM
      • Ellipsometry
      • Digital Microscope
      • Profilometers
      • Tensiometer
      • Probe Station
      • Basic Microscopes
    • Soft Lithography
      • PDMS Station
      • PDMS Spin Coater
      • PDMS Alignment Tool
      • PDMS Port Creator
      • Corona Treater
      • Plasma Reactor
      • PVD Chamber
    • 3D Printing
      • MakerBot Method X 3D Printer
      • 3D Systems Figure 4
    • General Process Equipment
      • Wafer Dicer
      • Wire Bonder
      • CO2 LASER Engraver
      • Furnaces & Ovens
  • Rate & Fees
  • Resources
    • Internal and External Resources
    • Software
  • Contact
    • People
    • Locate
    • Service Request Form
  • Associated Research Centers
Info for
  • Prospective Students
  • Current Students
  • Alumni
  • Degree Programs
KU The University of Kansas KU The University of Kansas
Gray-Little Hall (Formerly ISB/CDS1)
1567 Irving Hill Road, Room 1180
Lawrence, KS 66045
Bus Routes: 4, 8, 11, 30, 38, 42, 43
KUnanofab@ku.edu
785-864-1918
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