Quorum Q150R ES Sputter Coater
The Q150R ES is a combination sputter coating and carbon/metal evaporation tool. Interchangeable inserts are provided for each process. It is used to prepare SEM samples for imaging. A deposition monitor is installed to provide accurate film thicknesses of sputtered materials.
Currently available sputter targets:
- Gold
- Gold/Palladium (60:40)
For detailed instructions on using the instrument, please click on the following links.